Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Fabrication process flow for the anisotropically wet-etched pitch/roll

PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

SED distribution for the second elliptical in-plane mode of the

PDF) Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Frequency response of SD-BAW gyroscope at pickoff electrodes aligned

The development of micromachined gyroscope structure and circuitry technology. - Abstract - Europe PMC

Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Performance metrics of the SD-BAW gyroscope

Eigenmode operation of piezoelectric resonant gyroscopes

PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

SEM view of the SD-BAW gyroscope (a), and close-up view of the 270 nm

A mode-matched force-rebalance control for a MEMS vibratory gyroscope - ScienceDirect